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Characterisation & Testing

Testing

Atomic Force Microscope (AFM)Reservation

Model：Dimension Icon

Status： Operating

Function：Accurately observe the 3D topography of micro-regions (nanometer and submicron scales) on the sample surface; meanwhile, it can scan the electric field/magnetic field distribution, surface potential and other properties of the sample surface.

East District Test Area III,West District Test Area I+86-21- 34207734-8010
LSM800 Confocal Laser Scanning Microcopy Reservation

Model：LSM800

Status： Operating

Function：材料、器件的微纳结构及表面形貌观察

东区测试III区+86-21- 34207734-8010
3D Optical Profilometer Reservation

Model：Zeta-20

Status： Operating

Function：收集高分辨率的3D扫描信息和样品表面真彩色图像。

东区薄膜Ⅲ区、西区薄膜II区+86-21- 34207734-8010
Measuring microscope Reservation

Model：STM7

Status： Operating

Function：主要用于微纳加工样品的结构观察及测量

西区薄膜IA区+86-21- 34207734-8010
Optical Microscope Reservation

Model：Scope.A1、Lab.A1、Axio Scope A1

Status： Operating

Function：基片表面光学观察

西区光刻I区、西区薄膜IA区、东区光刻ⅢB区+86-21- 34207734-8010
Surface Profiler Reservation

Model：P7

Status： Operating

Function：1. 在探针允许范围内台阶与沟道深度测量；
2. 各类沉积薄膜厚度测量；
3. 表面粗糙度测量。

东区薄膜Ⅳ区、西区薄膜IA区+86-21- 34207734-8003

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SERVICE AND INNOVATION FOR MICRO/NANOTECHNOLOGY

Address: 800 Dongchuan Road, Minhang District, Shanghai 200240, China

Tel: +86 21 3420 7734

Email: aemd@sjtu.edu.cn

AEMD-SJTU

©2016 Advanced Electronics Materials and Devices, Shanghai Jiao Tong University.沪交ICP备20151197

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