The platform supports micro- and nano-fabrication processes for silicon, glass, III–V compound semiconductors, and organic materials. Core processes include photolithography (electron-beam lithography, KrF deep ultraviolet lithography, and double-sided UV lithography), wet and dry etching, thin-film deposition, packaging, electroplating, and oxidation and diffusion. Equipped with a full chain of processing tools, the platform enables integrated fabrication and testing capabilities for devices and patterns ranging from 10 nm to the micron scale.

A wide range of characterization and testing equipment enables in-line and off-line process monitoring and characterization, as well as electrical and optoelectronic performance evaluation.

Possesses integrated process capabilities for various types of micro- and nano-devices, providing users with customized fabrication and R&D services.