The AEMD platform provides micro/nano fabrication and characterization services for silicon-, glass-, and polymer-based devices and structures on 6-inch and select 8-inch-and-below wafers. Service models include commissioned fabrication and testing, user-operated processing, professional training programs, customized micro/nano structures and devices, and collaborative project development.
 
Commissioned Fabrication and Testing
Based on user requirements, the platform provides single-step, multi-step, and fully integrated commissioned fabrication and testing services for micro/nanofabrication processes, ensuring high-quality and high-efficiency processing and characterization support.
 
Self-Operation 
The platform provides self-operation access for selected equipment. After completing platform training and passing the required qualification assessment for cleanroom access and equipment operation authorization, users can independently book equipment and conduct fabrication and testing, enabling a flexible hands-on operational experience.
 
Training of Professional Personnel
The platform provides comprehensive cleanroom training for internal and external users, helping them acquire professional micro/nanofabrication techniques and equipment operation skills, and fostering skilled talent development.
 
Customized Micro/Nano Structures and Devices
The platform provides customized services, capable of processing thin films and micro/nanostructured semi-finished products, and delivering tailor-made micro/nanostructures and device-ready components to meet diverse application requirements.

Project Collaborative Development
1.Scientific Research and Technical Support
The platform supports national major research projects and provides technical backing. Leveraging Shanghai Jiao Tong University’s multidisciplinary strengths and talent resources, and relying on the R&D capabilities of the AEMD platform, it collaborates with research institutes and industry partners to apply for national and ministerial-level projects, jointly advancing technological research and innovation.

2.Tape-Out and Testing Environment
The platform provides a tape-out and testing environment for micro/nano-fabricated products to research institutions and small-to-medium-sized R&D companies, supporting product development and technology validation.
 
3.Equipment Supplier Collaboration
The platform provides a venue for semiconductor equipment suppliers to demonstrate prototypes and engage in collaborative process development, promoting the refinement and broader application of equipment technologies.

4.Research Projects and Product Development
The platform provides fabrication services or collaborative project support for research projects and product development from external research institutions and enterprises at all levels, facilitating technology transfer and industrial applications.

 
The AEMD platform is committed to providing efficient micro/nanofabrication and technical support services for various research institutions, enterprises, and innovation projects, facilitating cutting-edge scientific research and its industrialization.