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Ancillary lithography equipment
Micro-/Nano Fabrication
Ancillary lithography equipment
Lithography / Patterning
Ancillary lithography equipment
Thermal Processing & Ion Implantation
Wet Cleaning & Etching (incl. CMP)
Thin Film Deposition
Dry Etching
Electroplating / Electroforming
Packaging (incl. Dicing, Grinding & Polishing)
Testing
Lithography / Patterning
Ancillary lithography equipment
Thermal Processing & Ion Implantation
Wet Cleaning & Etching (incl. CMP)
Thin Film Deposition
Dry Etching
Electroplating / Electroforming
Packaging (incl. Dicing, Grinding & Polishing)
Testing
Ordinary hot plate
Reservation
Model：
303DU hotplate
Status：
Operating
Function：
Photoresist baking
East Area, Lithography IIIA Zone; West Area, Lithography I Zone
+86-21- 34206126-6005/6029
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