台阶仪/表面轮廓仪

（Surface Profiler）

主要用途/ Application：

在探针允许范围内台阶与沟道深度测量，能够精确测量各类沉积薄膜厚度及结构图型等样品表面的高度变化，用于分析厚度、台阶高度、粗糙度等，能够测量微米到纳米级别的高度变化，广泛应用于半导体、光学器件等领域。

 

Within the probe’s allowable range, step and trench depth measurements can accurately determine the thickness and structural patterns of various deposited thin films on sample surfaces, which is used for analyzing parameters such as thickness, step height, and roughness. It is capable of measuring height changes at the micron to nanometer level and is widely applied in fields such as semiconductors, optical devices, and others.

 

设备工作原理简介/ Operating principle：

探针与样品直接接触并在样品表面移动，探针通过接触样品表面，并随着表面起伏垂直上下移动，台阶仪通过检测探针的垂直位移来测量样品的表面形貌，探针的横向移动由高精度的电机控制，表面轮廓数据由探针的垂直移动产生并记录。

The probe makes direct contact with the sample and moves across the sample surface. By touching the surface of the sample and moving vertically up and down with the undulations of the surface, the stylus profiler measures the surface topography of the sample by detecting the vertical displacement of the probe. The lateral movement of the probe is controlled by a high-precision motor, and the surface profile data is generated and recorded by the vertical movement of the probe.

 

 

技术指标/ Specifications：

1. 自动样品台，闭环自动移动范围150mmx150mm。
2. 沟道或台阶测试时, 垂直测量范围1mm以内。
3. 超微力传感器,0.5mg到50mg可调。
4. 基片尺寸：支持6 英寸以下5、4、3英寸以及破片

 

1. Automatic sample table;XY axis moving range: 150mm*150mm
2. Vertical measure range: <1mm
3. Ultramicro force:0.5-50mg controllable
4. Sample size: 6” and below

 

典型使用案例/ Typical scenario：

台阶样品测试（采样率100hz，扫描速度50mm）

Step sample testing (sampling rate 100hz, scanning speed 50 μ m)

设备类别/Facilities：测试设备/ Characterization

设备编号/No.：EFM3SP701

设备地点/Location：东区薄膜Ⅲ区/ East Thin Film III Area

 

工艺工程师/Engineer in response:

姓名：瞿敏妮；邮箱：minni.qu@sjtu.edu.cn；电话：021- 34207734-8003

Name: Minni Qu；Email：minni.qu@sjtu.edu.cn; Tel: 021- 34207734-8003.

 

设备照片/Photos：