KLA-Tencore D-120表面轮廓仪(台阶仪)
(KLA-Tencore D-120 Surface Profiler)
主要技术指标/Specifications:
- 超微测量力:0.03-10mg
Tip force: :0.03-10mg
- 最大扫描长度55mm(线性)
Max. scanning length: 55mm (linear)
- 最大采样点数120,000
Max. sampling: 120,000
- 探针曲率半径5 mm
Tip radius: 2.5mm
- 垂直分辨率:最小38A、最大垂直测量范围: 800 mm
Vertical resolution: Min.0.38A; Max. vertical meas. rang: 800 mm
主要用途/Applications:
材料表面台阶高度及粗糙度的测量
Measuring step height or roughness of materials surface