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Furnace Processing
Fabrication Processes
Furnace Processing
Patterning
Thin Film Growth & Deposition
Dry Etching
Furnace Processing
Wet Cleaning & Etching
Packaging
Patterning
Thin Film Growth & Deposition
Dry Etching
Furnace Processing
Wet Cleaning & Etching
Packaging
Furnace Processing
扩散掺杂
: 6
”及以下硅晶圆的硼扩散或磷扩散（包括预沉积和推进）
离子注入
:
8
”及以下基片的
B
、
P
、
As
、
Si
、
Ge
、
In
、
Ar
的离子注入掺杂（可批量加工），以及后续掺杂剂的高温激活
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