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Film Thickness Measurement
Testing & Characterisation
Film Thickness Measurement
Surface Morphology Measurement
Film Thickness Measurement
Thin Film Property Characterisation
Electrical/Optical Characterisation of Devices & Chips
Surface Morphology Measurement
Film Thickness Measurement
Thin Film Property Characterisation
Electrical/Optical Characterisation of Devices & Chips
薄膜厚度量测
椭圆偏振光谱仪测量多层膜厚度及折射率、消光系数（右）并与聚焦离子束截面（左）作对比分析：
紫外干涉膜厚仪测量SiO
2
/SOI结构样品中顶硅的厚度及分布：
台阶仪测量光刻胶轮廓：
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