8 inch wafer metallographic microscope

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Operating

Model：	MX63
Function：	Optical inspection of wafer surfaces.
Engineer：	Teacher Wang / +86-21-34206126-6005 / fdwang@1
Location：	East Area – Lithography IIIA
Equipment ID：	ELT3WMM01

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Basic Equipment Information
Operating Principle
Typical Application Case

Main Application

The system is designed for optical inspection and characterization of wafer surfaces.

Technical Specifications

Reflected-light optical microscopy
Objective magnifications:5×,10×,20×,50×,100×

An optical microscope magnifies and images microscopic objects using a combination of two lens groups: the objective lens and the eyepiece. The objective lens forms an enlarged real image of the specimen, while the eyepiece further magnifies this image to produce a virtual image for observation. In reflected-light mode, illumination is directed onto the sample surface through the objective lens, making the system suitable for observing opaque materials such as semiconductor wafers.

Using the 100× objective, a calibration scale with an actual length of 100 μm was measured as 99.62 μm by the imaging software, demonstrating excellent measurement accuracy.

Compatible with wafers up to 8 inches in diameter and wafer fragments. Contaminated samples are not accepted.

Compatible with wafers up to 8 inches and wafer fragments. Samples must be free of contamination, and the backside of the wafer must be clean. After use, reduce the illumination intensity to the minimum level. Do not touch the microscope or operate the control computer while the system is running, as accidental operation may interrupt measurement or cause equipment malfunction. If an alarm occurs, please contact the responsible equipment engineer immediately.

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

The microscope illumination does not turn on. What should I do?

1.Check whether the illumination mode, aperture settings, and brightness level are correctly configured. 2.Verify that the power cable is securely connected and that the power outlet is functioning properly. 3.If the backup lamp needs to be replaced, please contact the equipment engineer.

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