Measuring microscope

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Measuring Microscope

Operating

Model：	STM7
Function：	It is primarily used for structural observation and measurement of micro- and nano-fabricated samples.
Engineer：	Teacher Shen / +86-21- 34207734-8010 / shenyunliang@1
Location：	East Area,Thin Film Zone IV
Equipment ID：	EFM4STM01

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Application

It is primarily used for structural observation and measurement of micro- and nano-fabricated samples, and can also be applied to measurements of large samples exceeding the field of view.

Technical Specifications

For standard samples, the planar measurement accuracy is ≤3µm+2%×L, where L is the measured length. Acceptance criteria: for L=100mm, the measured result is 99.9988 mm; for L=1mm, the measured result is 0.9991 mm.

For standard samples, the Z-axis measurement accuracy is ≤5µm+3%×L, where L is the measured length. Acceptance criteria: for L=1.38mm, the measured result is 1.3806 mm.

For deep silicon-etched trench samples with an opening width of 50 µm and a depth greater than 120 µm, the depth measurement error is ≤ 5 µm.

The measuring microscope utilizes an active reflection and confocal-based autofocus system.

Figure 1. Optical path of the active reflection and confocal autofocus system.

1.For deep silicon-etched trench samples with an opening width of 50 µm and a depth exceeding 120 µm, the depth measurement error is ≤ 5 µm.

It is primarily used for structural observation and measurement of micro- and nano-fabricated samples.

Samples must be < 8 inches, and the backside of the sample must be clean. After use, please set the brightness to the minimum level. Close the software after completing the operation.

During equipment operation, do not touch the equipment or operate the computer to avoid accidental actions that may cause equipment shutdown or malfunction.

If any equipment alarm occurs, please notify the responsible equipment engineer.

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

能否测量8寸晶圆内不在同一视场的结构尺寸？

测量显微镜可以测量超出视场范围大样品尺寸。

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