Organic Resist Strip Cleaning Station

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Equipment Information Guidelines for Contract Processing Inquiry

Operating

Model：	Custom
Function：	The equipment is equipped with two sets of tanks of different sizes, and can perform lift-off, photoresist removal and other processes using reagents such as acetone, isopropanol and PRS3000.
Engineer：	Li / +86-21- 34206126-6015 / lijinxi@1
Location：	East Area, Organic Wet Process Zone II
Equipment ID：	EOM2ORS01

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Primary Application

This equipment is mainly suitable for samples of two specifications: 8–6 inches and 4–3 inches. It is equipped with two sets of tanks of different sizes (max. 5 pieces per tank per batch), and can perform organic cleaning, photoresist removal and lift-off processes using organic reagents such as acetone and isopropanol.

Process / Testing Capabilities

It can process a maximum of 5 samples below 8 inches. The equipment is equipped with an ultrasonic function with adjustable frequencies of 80 kHz and 120 kHz, and the tanks are fitted with a heating function that allows for free temperature setting.

Technical Specifications

Substrate size: compatible with sizes below 8 inches; maximum capacity: 5 pieces per tank; ultrasonic power: adjustable; tank dimensions: 225L × 100W × 250H mm

The equipment is equipped with two sets of tanks of different sizes. Corresponding organic reagents are added into the tanks for the immersion treatment of samples, and the ultrasonic function can be activated to enhance the photoresist removal or lift-off effect. Photoresist is removed with acetone, followed by further cleaning with isopropanol or anhydrous ethanol; residual organic reagents are then rinsed off with deionized water, and the samples are finally blow-dried with a nitrogen gun.

It is suitable for photoresist removal after lithography, lift-off after sputtering, and organic cleaning of samples.

Reserve this equipment when organic cleaning or lift-off tanks are required for use.

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

此设备超声功率可以调节吗？

80K和120KHZ 可调

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