CMOS-grade RCA Cleaning Station

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Equipment Information Guidelines for Contract Processing Inquiry

Operating

Model：	Custom
Function：	This system is equipped with two sets of tanks of different sizes, designed for inorganic RCA cleaning of 6–8 inch and 3–4 inch wafers. Each tank can process up to 5 wafers simultaneously. The system supports full RCA cleaning processes using SC1, SC2, SPM, and DHF solutions.
Engineer：	Li / +86-21- 34206126-6015 / lijinxi@1
Location：	East Area, Inorganic Wet Process III Zone (Strict Metal Control)
Equipment ID：	EIM3CRC01

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Application

This system is designed for RCA cleaning of wafers sized 6–8 inches and 3–4 inches. It is equipped with two sets of tanks of different sizes, each capable of processing up to 5 wafers per batch. Cleaning is performed using SC1, SC2, SPM, and DHF solutions to remove organic contaminants, metal ions, and particles from sample surfaces.

Process / Testing Capabilities

Processes up to 5 wafers (≤8 inches) per batch. SC1 tank is equipped with ultrasonic functionality (adjustable at 80 kHz and 120 kHz). SC1, SC2, and SPM tanks are equipped with heating functions with adjustable temperature settings

Technical Specifications

Dimensions: approximately 1800 (L) × 1200 (W) × 2000 (H) mm
Working surface: 1600 × 900 mm; constructed with 12 mm PP (polypropylene) white panel
Tank size: 225 (L) × 100 (W) × 250 (H) mm

The system utilizes multiple chemical baths (SC1, SC2, SPM, DHF) with controlled heating and optional ultrasonic agitation to perform sequential RCA cleaning steps, effectively removing organic contaminants, metallic impurities, and particles from wafer surfaces.

Pre-cleaning for critical process steps. Effective removal of organic contamination, metal ion contamination, and particulate contamination

RCA cleaning for 8", 6", 4", and 3" wafers. Reservation is required when using tank-based processing; for self-prepared solutions, reserve beaker usage separately

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

此设备可以自主操作吗？

不可以，需要提前预约，由工程师操作设备

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