Spin Module 200

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Semi-Automatic Spin Coater

Spin Module 200

Operating

Model：	SM-200
Function：	Primarily used for the spin coating process in photolithography; enables uniform coating of photoresist or other liquid materials, suitable for high-precision coating on wafers and substrates.
Engineer：	Zhang / +86-21-34206126-6029 / captianzhangdi@1
Location：	East Area, Lithography IIIA Zone
Equipment ID：	EDD2SMS01

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Applications

Mainly used for spin coating in photolithography processes
Capable of uniformly coating photoresist, electron beam resist, bio-coatings, or other functional liquid materials
Suitable for high-uniformity coating of wafers (1–8 inches) and special substrates

Process / Testing Capabilities

Compatible with 1–8 inch wafers, supports multiple size configurations
Equipped with automatic spin coating, automatic/manual dispensing, and manual loading/unloading
Adjustable process parameters: spin speed, acceleration, time, and rotation direction
Supports coating uniformity testing, edge bead removal (EBR), and backside rinse verification

Technical Specifications

Supports spin coating for wafers of 1/2/3/4/5/6/7/8 inches
Manual wafer loading/unloading; automatic dispensing (switchable to manual); automatic spin coating
Spin speed range: 0–6000 rpm; acceleration reaches 6000 rpm within 0.6 seconds
Speed control accuracy: ±1 rpm; rotation direction: clockwise and counterclockwise
Supports edge bead removal (EBR) and backside rinse functions

Used in photolithography spin coating processes to uniformly apply photoresist or other liquid materials, enabling high-precision coating on wafers and substrates.

1、Samples must be confirmed with process engineers in advance
2、Both frontside and backside of the samples must be flat and clean

Available all day. The sample must be confirmed with the process instructor in advance. Both the front and back surfaces of the sample must remain flat and clean. Do not touch the sample directly with your hands before use.

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

Spin chuck cannot be lifted

The waste liquid container needs to be replaced

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