Hotplate 200

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Semi-Automatic Hotplate

Hotplate 200

Operating

Model：	HP-200
Function：	Primarily used in photolithography baking processes, including photoresist pre-baking, post-baking, and other thermal treatments. Ensures uniform heating to improve pattern quality and adhesion.
Engineer：	Zhang / +86-21- 34206126-6029 / captianzhangdi@1
Location：	East Area, Lithography IIIA Zone
Equipment ID：	EDD2HPS01、EDD2HPS02

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Applications

Used for wafer thermal processing in photolithography, including photoresist soft bake (post-coating bake) and post-exposure bake
Applicable to other temperature-controlled thermal processes such as material curing and stress relief
Supports wafers up to 8 inches and smaller sizes

Process / Testing Capabilities

Supports various temperature settings for soft bake and post-bake process optimization
Adjustable proximity distance between wafer and hotplate to evaluate heat transfer efficiency and baking uniformity
Enables evaluation of thermal effects on pattern resolution, edge integrity, photoresist adhesion, and thermal stability
Suitable for process window development, validation, and parameter optimization
Supports multi-size wafer processing up to 8 inches for research and pilot-scale applications

Technical Specifications

Temperature range: 0°C to 250°C
Temperature accuracy: ±0.6°C at 100°C
Operating mode: proximity heating; gap adjustable from 0–8 mm via pins
Wafer compatibility: up to 8 inches, compatible with smaller sizes

Used in photolithography baking processes, including photoresist soft bake, post-exposure bake, and other thermal treatments. The system ensures uniform heating to improve pattern quality and adhesion.

1、Samples must be confirmed with process engineers in advance
2、Both frontside and backside of the samples must be flat and clean

Available for use throughout the day. Samples must be confirmed with process engineers in advance. Both frontside and backside of the samples must be flat and clean. Please keep the equipment clean and tidy after use

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

Is it necessary to remove the protective glass plate?

No, it is not required.

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