BINDER Nitrogen Oven
Nitrogen Oven
Operating
Model: FP53
Function: 1.Nitrogen-protected oven 2.Process temperature range: 0–300 °C, adjustable The system is programmable, enabling control of temperature ramp rates, dwell time, and other process parameters, with fully automated recipe execution.
Engineer: Mr. Li / +86-21- 34206126-6015 / lijinxi@1
Location: West Area Inorganic Wet Process Zone II, East Area Inorganic Wet Process Zone IVB.
Equipment ID: WW1BOVN01、WW2BOVN02
  • Basic Equipment Information
  • Operating Principle
  • Typical Application Case
Main Application

1.Nitrogen-protected oven

2.Process temperature range: 0–300 °C, adjustable.

The system is programmable, enabling control of temperature ramp rates, dwell time, and other process parameters, with fully automated recipe execution.

 

Process/Testing Capability

Process temperature range: 0–300 °C, adjustable.

The system is programmable, enabling control of temperature ramp rates, dwell time, and other process parameters, with fully automated recipe execution.

 

Technical Specifications

Two programmable control programs are available. The nitrogen flow rate can be independently adjusted. The process temperature is adjustable from 0 to 300 °C. The system accommodates a wide range of sample sizes with high flexibility. It adopts an electronically controlled chamber preheating technology with forced convection. The fan speed is adjustable from 0 to 100%.

By heating the process chamber and introducing nitrogen gas during processing, the system enables sample baking, as well as annealing and other thermal processes within the 0–300 °C temperature range.

 

It is used for processes such as baking BCB photoresist, as well as drying applications.
The samples must be front-end samples, with no photoresist and no metal film layers.
The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.
FAQs
  • 01
    此设备的可用程序有多少个?

    2个

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