Spin Dryer

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OEM Spin Rinse Dryer

Spin Dryer

Operating

Model：	870S
Function：	Capable of automated spin drying for one cassette of 4-inch or 6-inch wafers (up to 25 wafers per batch)Wafers are first rinsed with deionized (DI) water, followed by high-speed spin drying using high-purity nitrogen (N₂)
Engineer：	Mr. Li / +86-21- 34206126-6015 / lijinxi@1
Location：	West Area,Inorganic Wet Processing Zone I (Strict Metal Control)
Equipment ID：	WW1OSRD01、WW2OSRD02

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Application

The system is designed to remove residual moisture from wafer surfaces after wet processing. It is suitable for spin drying of 3-inch, 4-inch, 5-inch, and 6-inch polished wafers.

The system provides high-cleanliness rotational cleaning, integrating functions such as spray rinsing, spin drying, nitrogen (N₂) drying, chamber drying, and static charge elimination.

Process/Testing Capability

The system is equipped with upper and lower chambers, enabling independent spin-drying processes for 4-inch and 6-inch silicon wafers, respectively.

Technical Specifications

Maximum wafer capacity: 25 × 2 = 50 wafers
Control and display: Programmable controller with color touchscreen or LCD display and button interface
Gas lines equipped with precision filters, with filtration accuracy of 0.03 μm or better
Nitrogen (N₂) or clean air heating capability, with programmable heating duration and process-triggered activation at specified steps
Operating speed: continuously adjustable from 0 to 2000 RPM; maximum speed up to 2800 RPM

The system features upper and lower spin-drying chambers, where high-purity nitrogen (N₂) combined with high-speed rotation enables rapid drying of samples.

Used for spin-drying processes of 4-inch and 6-inch samples.

Samples must be front-end compatible (free of photoresist and any metal layers).

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

碎片可以甩干吗？

不可以

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