Multi-function wet bench
Multifunctional Operation Station 2 (Reserve when using the tank water bath heating function)
Operating
Model: Custom Wet Process Fume Hood
Function: 1.The equipment is equipped with a stainless steel ultrasonic tank (300×300 mm), which enables water bath heating and ultrasonic functions for samples. 2.There are no special restrictions on substrates and their surface materials. 3.The equipment can be externally connected to small desktop devices such as heating and ultrasonic units to realize flexible processing. 4.It is suitable for processing small and broken samples.
Engineer: Mr. Li / +86-21- 34206126-6015 / lijinxi@1
Location: West Area, Inorganic Wet Process Zone I (Strict Metal Control)
Equipment ID: WW1JMFE02
  • Basic Equipment Information
  • Operating Principle
  • Typical Application Case
Primary Application

This fume hood can be flexibly used for the versatile cleaning of various samples. Users may independently prepare solutions in containers such as beakers, and work with auxiliary equipment including hot plates and water bath tanks to achieve functions such as reagent heating and ultrasonic treatment.

 

Process / Testing Capabilities

Solutions can be independently prepared in various containers such as beakers and petri dishes. This equipment is flexibly applicable to cleaning and wet etching processes for all types of samples, and can be used in conjunction with a water bath heating ultrasonic tank to implement processes like silicon etching with KOH solution.

 

Technical Specifications

There are no specific requirements for substrate size, and the equipment is suitable for processing small and broken samples. Meanwhile, reagent types can be flexibly selected as needed, heating temperatures can be freely set, and the ultrasonic function can be activated on demand.

Wet Process Fume Hood: Flexible for the cleaning processes of micro-nano devices

It is suitable for the cleaning processes of various devices, and can also be applied to process steps such as water bath and ultrasonic treatment.

The sample is a front-end sample (no photoresist, with metal film layers).
The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.
FAQs
  • 01
    后道污染样品可以使用吗?

    不可以,后道样品请道湿法二区设备去进行工艺。

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