Ocean Optics紫外干涉膜厚仪
(Ocean Optics UV Film Thickness Measurement)
主要技术指标/Specifications:
- 测量范围 10A~40um
Thickness range: 10A-40um
- 测量精度 ±10A
Meas. accuracy : ±10A
- 光谱波长范围 200nm~1050nm
Spectrum wavelength: 200nm-1050nm
- 基片尺寸 2mm*2mm~200mm*200mm
Substrate size: 2mm*2mm~200mm*200mm
- 其他功能 超薄膜测量能力,超大载物平台
Other function: Ultra thin film thickness measurement, large objective table
主要用途/Applications:
氧化物、氮化物、光阻及其他半导体制程薄膜厚度测量,光学常数(n、k)测量,多层膜光学常数及厚度测量。
Thin thickness and optical sonstant (n,k) measurement of transparent films, such as SiO2, Si3N4, photoresist, and so on.