Bruker ICON原子力显微镜
（Bruker ICON Atomic Force Microscope）
主要技术指标/Specifications:
- XY方向扫描范围90um×90um，Z方向扫描范围10um，XY全范围运动最大高度起伏低于4nm；
X-Y axis scanning range 90um×90um,Z-axis scanning range 10um, XY scanning maximum height variation is lower than 4nm;
- 智能自动进针方式；
Auto probe;
- 210mm真空吸附全自动样品台，可程序化控制；
210mm auto specimen stage with vacuum absorption;
- 配置接触模式、轻敲模式、相位成像模式、压电响应测试模式、横向力/摩擦力测试模式、扫描隧道显微镜、智能扫描模式；
Scanning mode: Contact mode, Tapping mode, Phaseimaging, Piezo Response Force Modulation (PFM), Lateral Force Microscopy (LFM), Scanning Tunneling Microscopy (STM), ScanAsyst mode;
- 样品台：210mm真空吸附全自动样品台，可程序化控制；
210mm auto specimen stage with vacuum adsorption;
- 导电AFM:通过测量电流对导体的导电性及完整性的变化进行成像；
Conductive Atomic Force microscopy: imaging of conductivity difference by testing specimen current can check the integrality of conductor material;
- 可实现程序控制的纳米刻蚀功能，工业标准的C++编译软件；
Provide nanofabrication process, the industry standard C++ software;
- 提供-35℃至250℃成像功能。
Provide -35℃ to 250℃ imaging.
主要用途/Applications:
准确观测样品表面微区(纳米及亚微米尺度)三维形貌；同时可对样品表面物理化学特性进行研究，即摩擦性能、材料表面粘弹性、材料表面粗糙度、材料导电性能表征及纳米操纵等。
Mainly applied in high resolution observation of surface morphologies, and simultaneous detection of surface physical and chemical characteristics, including surface friction and viscosity, surface roughness, conductivity and nanofabrication, etc.
