Tousimis 全自动临界点干燥仪

Tousimis Automatic Critical Point Dryer

• 设备功能
• 典型使用案例
• 工艺工程师

主要用途 /Application:

1. 生物材料在电镜观察前的脱水；
2. 高深宽比MEMS结构的干燥；
3. 多孔材料，如溶胶凝胶的干燥；
4. 其他精细结构的干燥。

1. Dehydrating biological tissues for SEM observation;
2. Drying high aspect ratio MEMS structures;
3. Drying porous structures, such as Sol-Gel;
4. Drying other delicate samples for SEM observation;

设备工作原理简介 /Operating principle:

在超临界状态下，气体和液体之间不再有界面存在，而是成为介于气体和液体之间的一种均匀的流体。这种流体逐渐从样品间隙中排出，由于不存在气-液界面，也就不存在毛细管力，因此不会引起样品间隙的收缩和结构的破坏，直至全部流体都从样品中排出，最后得到完美保形的样品结构。

Critical Point Drying is using the occurrence of a state where there is no apparent difference between the liquid and gas state of a medium, the surface tension between these interfaces reducing to zero. This occurs at a specific temperature and pressure with resulting density, and is known as the Critical Point. This condition of zero surface tension can be used to dry specimens, avoiding the damaging effects of surface tension.

工艺能力 /capability:

1. 晶圆尺寸：6寸及以下（含不规则）
2. 材料：SOI、SI、玻璃、铜片等其他半导体材料（具体咨询相关工艺工程师）

1. Wafer size: 6 inches or less (including irregularities)
2. Materials: SOI, SI, glass, copper and other semiconductor materials

技术指标 /Specifications:

1. 温度：-30°至60°C。干燥过程中，系统迅速从室温降到0℃。
2. 压力：0-2000psi
3. 功率：2500W-3000W

1. Temperature：-30 to 60℃. Sample typically experience 0-40℃.
2. Pressure：0-2000psi
3. Power：2500W-3000W

1. 采用CO₂超临界干燥去除溶剂搁板，高分子薄膜保持在原来垂直方向上，提高了其光电性能.[ Argonne National Laboratory Seth B. Darling, PhD.]

2.溶胶-凝胶：临界点干燥 VS 风干[Tousimis Research Corporation Rockville, MD]

3.由低应力氮化硅制成的耦合振荡器SEM图，放大倍数：300X [Cornell Nanoscale Facility and Department of Applied Physics, Rob llic and H. G. Craighead (Craighead Group)]

4.倾斜微平台[University of Michigan at Ann Arbor, Department of Engineering, USA Yuan Xie, Ph.D.]

5.纤维原细胞附件的细胞骨架结构图[University of Pennsylvania, Philadelphia, PA Prof. Tatyanna Svitkina]

 

设备类别 /Facilities: 湿法清洗与湿法刻蚀 /Wet cleaning and Wet etching Equipment

设备名称 /Name: Tousimis 全自动临界点干燥仪 /Tousimis Automatic Critical Point Dryer

设备编号 /No.: WW1TCPD01

设备地点 /Location: 西区测试I区 /West Test Zone I

 

姓名：田苗；邮箱：miaotian@sjtu.edu.cn；电话：021-34206126-6006

Name: Miao Tian; Email：miaotian@sjtu.edu.cn; Tel: 021-34206126-6006

 

设备照片 /Photos: