FSM薄膜应力测量仪

(FSM Film Stress Measurement System)

主要技术指标/Specifications:

1. 测量范围：1MPa-4000MPa,张应力或压应力

        Stress range: 1MPa-4000MPa, tensile& compressive

2. 测量原理：激光扫描无损害非接触式测量

        Principle of measurement：Laser scanning without touching

3. 基片尺寸：8寸并向下兼容6、5、4、3、2英寸

        Substrate size: Up to 8inch, applicable to 6, 5, 4, 3, 2inch

4. 加热功能：~500℃

        Heating up to 500℃

主要用途/Applications:

        FSM薄膜应力测量仪

        For film stress measurement