报告题目：Electroplating…an amazing Techniques for Manufacturing of MEMS Devices
报告人： A.Kondomitsos
报告内容：Harmonic Drive – an example for a successful transfer of MEMS application from lab into a production scale by X-ray lithography with SU-8 including electroplating of gold for mask processing and Nickel-Iron electroplating.
报告时间：2015-06-12 12:15
报告地点：微电子大楼401会议室