电化学CV测试仪
（Electrochemical CV-Profiler）
主要用途/ Application：
电化学CV测量主要用于半导体材料的研究及开发。其原理是使用电化学电容-电压（C-V）法来测量半导体材料的掺杂浓度分布。选用合适的电解液与材料接触、腐蚀，通过C-V描可准确地测量硅衬底表面的掺杂浓度分布，用于评估和控制在半导体生产中的掺杂过程。载流子浓度范围覆盖1011cm-3至1021cm-3。
Electrochemical CV measurement is mainly used in the research and development of semiconductor materials. It’s principle is to use the electrochemical capacitance voltage (C-V) method to measure the doping concentration distribution of semiconductor materials. By selecting appropriate electrolytes and materials for contact and corrosion, the doping concentration distribution on the surface of silicon substrates can be accurately measured through C-V sweep, which is used to evaluate and control the doping process in semiconductor production. The carrier concentration range covers 1011cm-3 to 1021cm-3.
设备工作原理简介/ Operating principle：
ECV测试的原理基于电化学中的阳极氧化及电解原理，通过合适的电解液，既可以作为肖特基接触的电极测量C-V特性，又可以进行电化学腐蚀，因此能够层层剥离测量电激活杂质的浓度分布。
The principle of ECV test is based on the anodic oxidation and electrolysis principles in electrochemistry. Through appropriate electrolytes, it can be used as an electrode for Schottky contact to measure C-V characteristics, as well as for electrochemical corrosion. Therefore, it can strip and measure the concentration distribution of electroactive impurities layer by layer.
工艺能力/ Capability：
深度测量的分辨率最小可达到1nm，最快可达到100μm。载流子浓度范围覆盖1011cm-3至1021cm-3。
The resolution of depth measurement can reach a minimum of 1nm and a maximum of 100 μ m. The carrier concentration range covers 1011cm-3 to 1021cm-3.
技术指标/ Specifications：
最大样品尺寸：8英寸晶圆。最小样品尺寸需要覆盖密封圈面积同时接触两根探针，建议2cm×2cm以上。
Maximum sample size: 8-inch wafer. The minimum sample size needs to cover the sealing ring area while contacting two probes, and it is recommended to be 2cm x 2cm or more.
典型使用案例/ Typical scenario：
在Si校准晶片上测量的掺杂浓度分布图
Nx graph measured on Si calibration wafer
设备类别/Facilities：测试设备/ Characterization
设备编号/No.：ECMPECV01
设备地点/Location：东区CMP区/ East CMP Area
工艺工程师/Engineer in response:
姓名：瞿敏妮；邮箱：minni.qu@sjtu.edu.cn；电话：021- 34207734-8003
Name: Minni Qu；Email：minni.qu@sjtu.edu.cn; Tel: 021- 34207734-8003.
设备照片/Photos：
