不同线宽纳米图形加工
（设备：Vistec EBPG-5200电子束光刻系统）
Nano-pattern fabrication with various linewidth
(Tool: Vistec EBPG-5200 E-beam Lithography System)
FIB图形加工（三维重构、纳米线刻蚀、剖面切割、TEM样品制备）
（设备：Zeiss Auriga 场发射电子束/聚焦离子束双束系统）
Nanafabrication with FIB system(3D pattern reconstruction, nanowire ething, x-section cutting, preparation fo TEM sample)
(Tool: Zeis Auriga FE-SEM/FIB Dual-beam System)
高深宽比图形加工
（设备：SPTS反应离子深硅刻蚀系统）
Micopattern fabrication with high aspect ratio
(Tool:SPTS ICP-RIE deep silicon etching system)
采用电子束光刻和RIE刻蚀技术制备的硅基光波导
Fabrication of silicon-base waveguides with EBL and RIE
基于聚酰亚胺柔性薄膜的电路 深硅刻蚀纳米压印用模板
Flexible circuit on PI film Silicon-base Master fabrication for
nanoirimprinting with DRIE
AFM表面形貌及电学分析测试
(设备：Bruker ICON原子力显微镜)
Surface profile and electrical performance measurement with Atomic Force Microscope
(Tool:Bruker ICON AFM)
高深宽比纳米压印模板制作
(设备名称：Princision Imprint PI-D01纳米压印机)
High aspect ratio nano-imprinting templet with PDMS
(Tool: Princision Imprint PI-D01 Nano-imprinter)
半导体参数测试：TFT样品 l-V测试
(设备：Agilent BA1500半导体测试仪)
Semiconductor parameter test: I-V curve of TFT device
(Tool: Agilent BA1500)
相变材料薄膜应力测试
(设备名称：FSM薄膜应力测试仪)
Phase-change film stress measurement
(Tool: FSM Film Stress)
载流子浓度及电子迁移率测试
(设备名称：MMR霍尔效应仪 )
Testing of carrier concentration and mobility
(Tool: MMR Hall-effect Tester )