Ocean Optics可见光膜厚测量仪

Ocean Optics可见光膜厚测量仪 (Ocean Optics Film Thickness Measurement System with Microscope) 主要技术指标/Specifications: 测量范围：50nm-20um Thickness range: 50nm-20um 测量精度：1% Meas. accuracy :1% 光谱波长范围：400nm~850nm Spectrum wavelength: 400nm~850nm 基片尺寸：2mm*2mm~200mm*200mm Substrate size: 2mm*2mm~200mm*200mm 带显微镜系统，可进行微区定点测量 Equipped with microscope, can measure specified point film thickness 主要用途/Applications: 氧化物、氮化物、光阻及其他半导体制程薄膜厚度测量，光学常数（n、k）测量。         Thickness and optical constant (n, k) measurement of transparent films, such as SiO2, Si3N4, photoresist,…