Ocean Optics紫外干涉膜厚仪

(Ocean Optics UV Film Thickness Measurement)

主要技术指标/Specifications:

  1. 测量范围     10A~40um

Thickness range: 10A-40um

  1. 测量精度     ±10A

Meas. accuracy : ±10A

  1. 光谱波长范围    200nm~1050nm

Spectrum wavelength: 200nm-1050nm

  1. 基片尺寸     2mm*2mm~200mm*200mm

Substrate size: 2mm*2mm~200mm*200mm

  1. 其他功能     超薄膜测量能力，超大载物平台

Other function: Ultra thin film thickness measurement, large objective table

主要用途/Applications:

氧化物、氮化物、光阻及其他半导体制程薄膜厚度测量，光学常数（n、k）测量，多层膜光学常数及厚度测量。

        Thin thickness and optical sonstant (n,k) measurement of transparent films, such as SiO2, Si3N4, photoresist, and so on.

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