Precision Imprint PI-D01纳米压印机

（Precision Imprint PI-D01 Nano-imprint lithography machine）

主要技术指标/Specifications:

  1. 最小压印尺寸：<20nm

Imprint minimum feature size ：<20nm

  1. 最小残留层厚度：<15nm

Minimum residual layer thickness： <15nm

  1. 印章/基底尺寸 ：≤2inch to 6 inches

Stamp/substrate size: from 2inch to 6inch diameter

  1. 压印压力：0 – 10 bar

Imprint pressure: 0 – 10 bar

  1. 压印温度：室温到 300ºC

Imprint temperature: from ambient temperature to 300º; Imprint temperature setting accuracy: +/- 1deg

  1. 水冷，冷却速度最大50K/min

External water cooling unit that can reach 50K/min cooling capability for faster thermal imprinting cycles

  1. LED UV 光源。波长范围250nm到1000nm.峰值365nm,照明功率40mW/cm2

LED panel UV light source, mixed wavelength of 250nm to 1000nm with peak of 365nm, light power at sample of 40mW/cm2

  1. 印章材料可以是镍、硅、石英及聚合物，基底材料主要是硅、石英、GaAs及聚合物薄片

Capable of handling stamps made of nickel, silicon, quartz and polymeric stamps, and various kinds of substrate materials, including: Si, quartz, GaAs and polymeric sheets

  1. 集成双镜头光学对准系统(X,Y, theta);重合精度在10% 的对准标记线宽之内

Optical alignment system with integrated dual camera optical alignment system(X,Y, theta); overlay alignment accuracy is 10% of alignment mark line width after compensation for design mismatch between stamp and substrate

10. 可以使用聚合物印章做压印工艺的中间层

Able to use a polymer stamp as intermediate steps for imprinting work

主要用途/Applications:

纳米结构、纳米图形制备.兼具手动热压和自动紫外压印。

Fabricating structures in nano-meter scale with manual/automatic thermal & UV imprinting.

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