Ocean Optics可见光膜厚测量仪

(Ocean Optics Film Thickness Measurement System with Microscope)

主要技术指标/Specifications:

1. 测量范围：50nm-20um

Thickness range: 50nm-20um

2. 测量精度：1%

Meas. accuracy :1%

3. 光谱波长范围：400nm~850nm

Spectrum wavelength: 400nm~850nm

4. 基片尺寸：2mm*2mm~200mm*200mm

Substrate size: 2mm*2mm~200mm*200mm

5. 带显微镜系统，可进行微区定点测量

Equipped with microscope, can measure specified point film thickness

主要用途/Applications:

氧化物、氮化物、光阻及其他半导体制程薄膜厚度测量，光学常数（n、k）测量。

        Thickness and optical constant (n, k) measurement of transparent films, such as SiO₂, Si₃N₄, photoresist, and so on.