【AEMD系列技术研讨会】

High-rate nano manufacturing and flexible devices

报告题目：   High-rate nano manufacturing and flexible devices

报告人：        陈林森 教授

报告时间：   2015年12月09日  9:30

报告地点：   微电子大楼401会议室

 

报告人简介：

陈林森，苏州大学研究员、博导，“国家2011计划”苏州纳米科技协同创新中心-微纳柔性制造专业中心主任。苏州苏大维格光电科技股份有限公司董事长，数码激光成像显示国家地方联合工程研究中心主任，江苏省“333工程”首席科学家。

近10年来，承担了国家重大科技（攻关）计划、国家863计划、国际科技合作、江苏省重大成果转化专项和国家自然科学基金等项目。攻克了位相空间微纳光场调控、3D导航飞行曝光、纳米成像与连续变频纳米光刻和卷对卷纳米压印技术等重大难题并填补行业空白，例如研制的“微纳图形高速率直写光刻系统”在以色列、日本和我国高等院所应用；在功能薄膜设计方面，做出了开拓性工作，发明了纳米光变色、3D光学放大、超薄导光和金属微网格透明导电等高性能薄膜，在包括Microsoft等国际著名品牌产品(Surface Pro4)上应用。100余篇论文,100余篇发明专利,其中获中国专利奖（优秀奖）3项。

曾获国家科技进步奖（二等奖，2项）、江苏省科技奖（一等奖，3项）等科技奖20余项，全国留学回国人员成就奖、江苏省创新创业人才奖、全国先进工作者和苏州杰出人才奖等称号。

目前，承担国家863计划-重大项目（召集人）、国家重大科学仪器设备研制专项（首席专家）和国家自然科学基金重大研究计划-集成项目。兼任国家微纳加工与制造产业技术创新试点联盟副理事长、中国光学学会全息与光信息处理专委会主任、全国纳米技术标准化技术委员会委员和江苏省政协委员。

研究兴趣：微纳智能制造系统，裸眼3D激光显示、功能薄膜与柔性电子器件、3D光场打印。

 

报告内容简介：

The development of highly functional films with micro/nano-structures plays a significant role in accelerating the application progress of flexible devices. Design and fabrication of novel films with specific functional micro/nano-structure has become a popular trend in industry. But the processes and technologies for flexible devices still have to be improved.

Nanoscale feature size and high performance compatible with large format and cost-effective are two key challenges for flexible devices. One issue is the huge data processing, transferring and patterning for large format nano-structure devices. For example, a 6 inch format nano-device with 100nm feature size will have more than 2Tb data capacity. Different from silicone-based devices, the new technologies must be exploited for flexible substrates, including roll-to-roll nano-manufacturing instead of wafer-to-wafer patterning.

This topic will give an introduction to high rate micro/nano-patterning and approaches and systems for the highly functional films. The transparent conductive films with micro-metal mesh structures for large format projected capacitive touch panels and multi-angle directional nano-light-guide backlight for glasses-free three dimensional display have been investigated based on micro/nano optics. The transparent conductive films of 55 inch with >88% transmittance and <10/□ sheet resistance, and 5 inch nano-light guide directional backlight with 64 view angles have been shown and discussed. The related projected capacitive touch sensors have been presented. It is certain that the novel nano-manufacturing technologies will continue to show its powerful influences on the revolution of flexible, wearable, 3D films and devices in the near future.

There are lots of research collaboration opportunities on flexible optoelectronic devices based on the nano manufacturing.