【2015-06-12】Electroplating…an amazing Techniques for Manufacturing of MEMS Devices

报告题目：Electroplating…an amazing Techniques for Manufacturing of MEMS Devices 报告人： A.Kondomitsos 报告内容：Harmonic Drive – an example for a successful transfer of MEMS application from lab into a production scale by X-ray lithography with SU-8 including electroplating of gold for mask processing and Nickel-Iron electroplating. 报告时间：2015-06-12 12:15 报告地点：微电子大楼401会议室