Wet cleaning and Wet etching Equipment

No.	Equipment Name	East/West Lab	Lab	Status
1	MOS-Level Standard RCA-Clean Wetbench	West Lab	Wet Processes Lab I	Open
2	Wetbench for Dielectric Etching	West Lab	Wet Processes Lab I	Open
3	Wetbench for Photoresist Inorganic Removal	West Lab	Wet Processes Lab I	Open
4	MOS-Level Wet Process Fumehood	West Lab	Wet Processes Lab II	Open
5	MOS-Level OEM Spin-Dryer	West Lab	Wet Processes Lab I	Open
6	Inorganic Remove Resist Fumehood	West Lab	Wet Processes Lab I	Open
7	Non-MOS-level Standard RCA-Clean Wetbench	West Lab	Wet Processes Lab II	Open
8	Wetbench for Metal Etching	West Lab	Wet Processes Lab II	Open
9	Wetbench for Bulk Silicon Etching	West Lab	Wet Processes Lab II	Open
10	Non-MOS-Level General Wetbench	West Lab	Wet Processes Lab II	Open
11	Non-MOS-Level OEM Spin Dryer	West Lab	Wet Processes Lab II	Open
12	BINDER Nitrogen Oven	West Lab	Wet Processes Lab	Open
13	Wafer Clean Equipment	East Lab	COMD Wet Processes Lab	Open
14	General Wetbench	East Lab	COMD Wet Processes Lab	Open
15	Acid-Cleaning Wetbench	East Lab	COMD Wet Processes Lab	Open