| 1 | Oxford PECVD system | West Lab | Thin Film Lab II | Open |
| 2 | Denton Electron Beam Evaporator | West Lab | Thin Film Lab I | Open |
| 3 | Denton Multi-target Magnetic Control Sputtering System | West Lab | Thin Film Lab I | Open |
| 4 | Ulvac Ultra-high Vacuum Sputtering System | East Lab | Micro/Nanofabrication Lab | Open |
| 5 | LH-Z550 Sputtering System | East Lab | Micro/Nanofabrication Lab | Maintenance |
| 6 | Ion Beam Sputtering System, IBD | East Lab | Micro/Nanofabrication Lab | Open |
| 7 | Automatic Muti-targets Sputtering System | East Lab | Photoelectric Devices Test Lab | Open |
| 8 | E-Beam Evaporator | East Lab | Photoelectric Devices Test Lab | Open |
| 9 | OLED Device Preparation System | East Lab | Photoelectric Devices Test Lab | Open |
