| 1 | SVCS Horizontal Oxidation Furnace | West Lab | Oxidation/Diffusion Lab | Open |
| 2 | SVCS Horizontal Boron Diffusion Furnace | West Lab | Oxidation/Diffusion Lab | Open |
| 3 | SVCS Horizontal Phosphorus Diffusion Furnace | West Lab | Oxidation/Diffusion Lab | Open |
| 4 | SVCS Horizontal Polysilicon LPCVD Furnace | West Lab | Oxidation/Diffusion Lab | Maintenance |
| 5 | SVCS Horizontal Silicon Nitride LPCVD Furnace | West Lab | Oxidation/Diffusion Lab | Maintenance |
| 6 | THERMO RTP | West Lab | Oxidation/Diffusion Lab | Open |
| 7 | Premtek Rapid Thermal Process Oven | West Lab | Furnaces Lab | Open |
| 8 | Premtek Vacuum Rapid Thermal Process Oven | West Lab | Furnaces Lab | Open |
| 9 | RTP-300 Rapid Thermal Processing Furance | East Lab | Micro/Nanofabrication Lab | Open |
