Lithography/Patterning Equipment
| No. | Equipment Name | East/West Lab | Lab | Status |
|---|---|---|---|---|
| 1 | Vistec EBPG-5200+Electron-beam lithography system | West Lab | Litho. Lab | Open |
| 2 | Precision Imprint PI-D01 Nano-imprint lithography machine | West Lab | Litho. Lab | Open |
| 3 | SUSS MA6 Mask Aligner | West Lab | Litho. Lab | Open |
| 4 | SUSS MA6/BA6 Double-sided UV Mask Aligner | East Lab | Micro/Nanofabrication Lab | Open |
| 5 | ABM Contact Mask Aligner with Deep /Near UV Exposure System | East Lab | Photoelectric Devices Test Lab | Open |
| 6 | ZEISS Auriga SEM/FIB Crossbeam System | West Lab | Thin Film Lab I | Open |