| 1 | SVS OV-12 HMDS Vacuum oven | West Lab | Litho. Lab | Maintenance |
| 2 | HMDS Oven | West Lab | Litho. Lab | |
| 3 | SUSS Spin-coater | West Lab | Litho. Lab | Open |
| 4 | Laurell 650-8N Spin-coater | West Lab | Litho. Lab | Open |
| 5 | SUSS Spin-Coater | West Lab | Litho. Lab | Open |
| 6 | Laurell Spin-Coater | East Lab | Litho. Lab | Open |
| 7 | EVG Spray Coater | West Lab | Litho. Lab | |
| 8 | SUSS Delta HP8 hotplate | West Lab | Litho. Lab | Open |
| 9 | HP-303DU hotplate | West Lab | Litho. Lab | Open |
| 10 | Hotplate | East Lab | Litho. Lab | Open |
| 11 | Developing Wetbench | West Lab | Litho. Lab | Open |
| 12 | Laurel developer | West Lab | Litho. Lab | Open |
| 13 | Binder N2-Protecting Oven | West Lab | Wet Processes Lab I | Open |
| 14 | JingHong General Oven | East Lab | Litho. Lab | Open |
