| 1 | Zeiss Ultra Plus Field Emission Scanning Electron Microscope | West Lab | Characterization Lab | Open |
| 2 | Bruker ICON Atomic Force Microscope | West Lab | Characterization Lab | Open |
| 3 | KLA-Tencor P7 Surface Profiler | West Lab | Thin Film Lab I | Open |
| 4 | AMBiOS XP-200 Surface Profiler | East Lab | COMD Wet Processes Lab | Open |
| 5 | Bruker Surface Profiler | East Lab | Micro/Nanofabrication Lab | Open |
| 6 | FSM Film Stress Measurement System | West Lab | Thin Film Lab II | Open |
| 7 | Ocean Optics UV Film Thickness Measurement | West Lab | Thin Film Lab II | Open |
| 8 | Ocean Optics Film Thickness Measurement System with Microscope | West Lab | Litho. Lab | Maintenance |
| 9 | CDEResMap Four Probe Resistance Tester | West Lab | Oxidation/Diffusion Lab | Open |
| 10 | ZETA3D Non-Contact Optical Microscope/Profiler | West Lab | Thin Film Lab II | Open |
| 11 | ZEISS Digital Microscope | West Lab | Thin Film Lab II | Open |
| 12 | MM Probe Station and Agilent BA1500 Semiconductor Parameter Analyzer | West Lab | Characterization Lab | Open |
| 13 | Keithley 4200 Semiconductor Characterization System | East Lab | Photoelectric Devices Test Lab | Open |
| 14 | MMR Hall and Van der Pauw Measurement System | West Lab | Characterization Lab | Open |
| 15 | Vibrating Sample Magnetometer | East Lab | Micro/Nanofabrication Lab | Open |
